中文

刘正坤

E-Mail:

Degree:Dr

Basic Information
Scientific Research

Papers

[1] liuzhengkun.Low-cost method of fabricating large-aperture, high efficiency, Fresnel diffractive membrane optic using a modified moire technique.CHINESE OPTICS LETTERS,2016,14(10):

[2] liuzhengkun.Alignment method for fabricating a parallel flat-field grating used in soft x-ray region.APPLIED OPTICS,2015,54(18):5782-5787.

[3] liuzhengkun,liuzhengkun.Studies on soft X-ray shearing interferometry with double-frequency gratings.ACTA PHYSICA SINICA,2013,62(7):

[4] liuzhengkun.Development of Micro-Spectrometer with a Function of Timely Temperature Compensation.SPECTROSCOPY AND SPECTRAL ANALYSIS,2015,35(5):1409-1413.

[5] liuzhengkun.Optical position sensor based on a digital wavelength-encoding grating ruler.OPTICAL ENGINEERING,2016,55(10):

[6] liuzhengkun.Fabrication of large-aperture and high efficiency Fresnel diffractive membrane optic using a self-aligned method.OPTIK,2015,127(20):9833-9839.

PatentsMore

[1] 周腾 ,qiukeqiang,liuzhengkun,xuxiangdong,hongyilin,fushaojun,一种等离子体刻蚀装置及其扩散装置,201920083740.4,2019-08-27,2019-08-27.

[2] 陈智文 ,qiukeqiang,liuzhengkun,xuxiangdong,hongyilin,fushaojun,一种平面双角闪耀光栅的制作方法,201910574843.5,2019-09-17,

[3] liuzhengkun ,林达奎,liuying,chenhuoyao,hongyilin,一种平面基底变间距光栅的线密度测试系统及测试方法,201910501496.3,2019-08-27,

[4] 周腾 ,qiukeqiang,liuzhengkun,xuxiangdong,hongyilin,fushaojun,一种等离子体刻蚀装置及其扩散装置,201910044200.X,2019-03-29,

[5] chenhuoyao ,liuying,梁举曦,wangyu,liuzhengkun,qiukeqiang,xuxiangdong,hongyilin,fushaojun,一种用于强激光系统中具有亚波长光栅减反结构的光束采样光栅,201720561886.6,2018-05-29,2018-05-29.

[6] liuying ,林达奎,chenhuoyao,liuzhengkun,qiukeqiang,xuxiangdong,hongyilin,fushaojun,抑制位相掩模垂直光栅矢量方向次生干扰的近场全息动态曝光方法,201710407545.8,2017-10-20,

[7] chenhuoyao ,liuying,梁举曦,wangyu,liuzhengkun,qiukeqiang,xuxiangdong,hongyilin,fushaojun,一种用于强激光系统中光束采样光栅的增透减反方法,201710357385.0,2017-08-11,

[8] 张健 ,liuzhengkun,qiukeqiang,xuxiangdong,fushaojun,具有高衍射效率的大口径薄膜衍射元件的制作方法,201610688679.7,2016-11-23,2018-12-14.

[9] liuying ,李媛芳,liuzhengkun,chenhuoyao,qiukeqiang,xuxiangdong,hongyilin,fushaojun,一种变间距光栅的近场全息-离子束刻蚀制备方法,201510988326.4,2016-03-16,2017-11-24.

[10] wangyu ,liuzhengkun,qiukeqiang,郑衍畅,liuying,hongyilin,一种光栅掩模与硅片{111}晶面的对准方法,201510793828.1,2016-03-23,2018-08-03.

Research ProjectMore

[1] 远紫外OVI波段全息非等间距非对称槽形闪耀光栅,进行,

[2] 大口径透射式CGH研制,进行,

[3] 非偏合束光栅研制,进行,

[4] 波带片刻蚀研制,进行,

[5] 大口径合束光栅研制,进行,

[6] 空间滤波器波带片研制,进行,

[7] 衍射补偿元件研制,进行,

[8] BSG刻蚀研制,进行,

[9] 下架元件全口径修复验证-反应气体离子源技术方案,进行,

[10] 空间滤波器透镜L3波带片研制,进行,