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自动化气体脉冲刻蚀方法、装置及系统

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:吴晓伟,weiwei,Sun Fangwen,fushaojun,hanzhengfu,guoguangcan

  • Patent description:发明

  • Application Number:201110009273.9

  • Number of Inventors:7

  • Service Invention or Not:no

  • Publication Date:2012-07-18

  • Authorization Date:2015-09-09

  • First Author:cuijinming


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