自动化气体脉冲刻蚀方法、装置及系统
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Affilication of Author(s):中国科学技术大学
Disigner of the Invention:吴晓伟,weiwei,Sun Fangwen,fushaojun,hanzhengfu,guoguangcan
Patent description:发明
Application Number:201110009273.9
Number of Inventors:7
Service Invention or Not:no
Publication Date:2012-07-18
Authorization Date:2015-09-09
First Author:cuijinming
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