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多孔硅湿敏传感器

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:shijunyan,hongyilin,taoxiaoming,fushaojun

  • Patent description:实用新型

  • Application Number:92245948.7

  • Number of Inventors:5

  • Service Invention or Not:no

  • Publication Date:1993-12-01

  • Authorization Date:1993-12-01

  • First Author:hanzhengfu

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