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一种用于CVD固态源的挥发装置
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: yanghui,lihaiou,caogang,xiaoming,guoguangcan
Patent description: 发明
Service Invention or Not: no
Publication Date: 2017-06-20
First Author: guoguoping