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化学气相沉积设备、方法及用途
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: yanghui,Li Hai Ou,caogang,xiaoming,guoguangcan
Patent description: 发明
Application Number: 201711005202.5
Number of Inventors: 6
Service Invention or Not: no
Publication Date: 2018-03-20
First Author: guoguoping