一种制备金属及合金薄膜的金属有机化学气相淀积法

Affilication of Author(s):中国科学技术大学

Disigner of the Invention:黄磊,chenchusheng,yangpinghua,pengdingkun

Patent description:发明

Application Number:96102145.4

Number of Inventors:5

Service Invention or Not:no

Publication Date:1997-08-13

Authorization Date:2001-08-22

First Author:mengguangyao