中国科学技术大学褚家如--中文主页-- 12、Design and Simulation of Microheater Actuated by A PZT Microcantilever for High Density Data Storage; Sensors and Actuators A108(2003), pp7-11

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12、Design and Simulation of Microheater Actuated by A PZT Microcantilever for High Density Data Storage; Sensors and Actuators A108(2003), pp7-11

上一条：11、A novel wet etching process for PZT thin film for application in MEMS, Jpn. J. Appl. Phys., Vol. 43, No. 6B, 2004

下一条：13、Microstructure and electrical properties of PZT thick film prepared by electrostatic spray deposition; Sensors and Actuators A108(2003)，pp2-6