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Monte Carlo Simulation of CD-SEM Images for Linewidth and Critical Dimension Metrology

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  • Impact Factor:1.33

  • DOI number:10.1002/sca.21042

  • Journal:SCANNING

  • Correspondence Author:dingzejun

  • Document Code:000317622000005

  • Volume:35

  • Issue:2

  • Page Number:127-139

  • ISSN No.:0161-0457

  • Translation or Not:no

  • Included Journals:SCI

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