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Monte Carlo simulation of full energy spectrum of electrons emitted from silicon in Auger electron spectroscopy

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  • Impact Factor:1.665

  • DOI number:10.1002/sia.5682

  • Journal:SURFACE AND INTERFACE ANALYSIS

  • Correspondence Author:dingzejun

  • Document Code:000346162100015

  • Volume:47

  • Issue:1

  • Page Number:113-119

  • ISSN No.:0142-2421

  • Translation or Not:no

  • Date of Publication:2014-12-31

  • Included Journals:SCI

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