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一种化学气相沉积系统

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:yanghui,lihaiou,caogang,xiaoming,guoguangcan

  • Patent description:发明

  • Service Invention or Not:no

  • Publication Date:2017-05-17

  • First Author:guoguoping
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