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位相型朗奇光栅槽深的光学检测方法
Release time:2021-07-23 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: fushaojun,liuzhengkun,xuxiangdong,hongyilin
Patent description: 发明
Application Number: 200810021578.X
Number of Inventors: 5
Service Invention or Not: no
Publication Date: 2009-01-07
Authorization Date: 2010-11-24
First Author: liuying