洪义麟
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具有刻蚀深度在线检测机构的衍射光学元件扫描刻蚀装置
Release time:2021-07-23 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: liuying,xuxiangdong,xudequan,hongyilin,fushaojun
Patent description: 发明
Application Number: 200810025255.8
Number of Inventors: 6
Service Invention or Not: no
Publication Date: 2008-10-01
Authorization Date: 2011-01-26
First Author: 徐作冬