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抑制位相掩模垂直光栅矢量方向次生干扰的近场全息动态曝光方法
Release time:2021-07-24  Hits:

Affilication of Author(s): 中国科学技术大学

Disigner of the Invention: 林达奎,chenhuoyao,liuzhengkun,qiukeqiang,xuxiangdong,hongyilin,fushaojun

Patent description: 发明

Application Number: 201710407545.8

Number of Inventors: 8

Service Invention or Not: no

Publication Date: 2017-10-20

First Author: liuying