洪义麟
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一种等离子体刻蚀装置及其扩散装置
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: qiukeqiang,liuzhengkun,xuxiangdong,hongyilin,fushaojun
Patent description: 实用新型
Application Number: 201920083740.4
Number of Inventors: 6
Service Invention or Not: no
Publication Date: 2019-08-27
Authorization Date: 2019-08-27
First Author: 周腾