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一种高电离率大面积氧化物阴极等离子体源阴极及制作方法
Release time:2021-07-24
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- liuyu,余鹏程,leijiuhou,caojinxiang
- Patent description:
- 发明
- Application Number:
- 201810225363.3
- Number of Inventors:
- 5
- Service Invention or Not:
- no
- Publication Date:
- 2018-08-17
- First Author:
- 李敏迟
- Pre One:一种维持动态压力的电负性气体喷射装置