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一种等离子体生成设备
Release time:2021-07-24
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- leijiuhou,凌艺铭,李敏迟,袁靖程
- Patent description:
- 实用新型
- Application Number:
- 201821086204.1
- Number of Inventors:
- 5
- Service Invention or Not:
- no
- Publication Date:
- 2019-04-05
- Authorization Date:
- 2019-04-05
- First Author:
- liuyu
- Pre One:谐振腔式ECR等离子体源装置以及方法
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