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谐振腔式ECR等离子体源装置
Release time:2021-07-24
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- 张仲恺,leijiuhou,caojinxiang
- Patent description:
- 实用新型申请
- Application Number:
- 201921134276.3
- Number of Inventors:
- 4
- Service Invention or Not:
- no
- First Author:
- liuyu
- Next One:谐振腔式ECR等离子体源装置以及方法