一种碳化硅单晶薄膜的制备方法
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Affilication of Author(s):中国科学技术大学
Disigner of the Invention:黄维,伊艾伦,欧欣,Jin-Shi Xu,Li Chuan-Feng
Patent description:发明公开
Application Number:201910102753.6
Number of Inventors:6
Service Invention or Not:no
Publication Date:2019-04-19
First Author:李强
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