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用于临近催化化学气相沉积的装置和方法

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:yanghui,Li Hai Ou,caogang,guoguangcan

  • Patent description:发明

  • Application Number:201711296987.6

  • Number of Inventors:5

  • Service Invention or Not:no

  • Publication Date:2018-05-18

  • First Author:guoguoping

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