凹腔型线圈天线的感应耦合等离子体发生设备
Release time:2021-07-23Hits:
Affilication of Author(s):
中国科学技术大学
Disigner of the Invention:
Liu Wandong,白小燕,陈志鹏,王慧慧,lihong,罗辰,吉亮亮,胡北
Patent description:
发明
Application Number:
200610164811.0
Number of Inventors:
9
Service Invention or Not:
no
Publication Date:
2007-09-26
First Author:
欧阳亮