中文
Login
P. Li, V. Sankara, F. Shah, H. Dey, G. Csaba, et al. Fabrication of Pseudo-Spin-Valve Giant Magnetoresistance Arrays for Nanomagnet Logic by Liftoff and the Snow-Jet Process.
Release time:2022-07-11
Hits:
- DOI number:
- 10.1116/1.4907408
- Journal:
- Journal of Vacuum Science & Technology B
- Abstract:
- In Nanomagnet Logic, an electronic read-out device converts magnetization to electronic signals. A giant magnetoresistance (GMR) stack, with simple deposition procedures, is a good candidate for this purpose. In this paper, the authors propose a way to pattern GMR films with the help of a CO2 snow-jet to simplify device fabrication procedures. A scanning electron microscope and a vibrating sample magnetometer were used to characterize the devices and verify the feasibility of the fabrication method. Results have shown that the CO2 snow-jet process can remove sidewalls of nanopillars that are formed after lift-off of sputtered films, and the nanopillars are uniform in shape and size. This method presents a new way to fabricate electronic readout devices for Nanomagnet Logic circuits.
- Document Code:
- 022801
- Discipline:
- Engineering
- Volume:
- 33
- Issue:
- 2
- Translation or Not:
- no
- Date of Publication:
- 2015-02-20
- Pre One:P. Li, T. Liu, H. Chang, A. Kalitsov, W. Zhang, et al. Spin Orbit Torque-Assisted Switching in Magnetic Insulator Thin Films with Strong Perpendicular Magnetic Anisotropy
- Next One:P. Li, D. Ellsworth, H. Chang, P. Janantha, D. Richardson, et al. Generation of Pure Spin Currents via Light-Induced Spin Seebeck Effect in Self-Biased Hexagonal Ferrite Films