P. Li, V. Sankara, F. Shah, H. Dey, G. Csaba, et al. Fabrication of Pseudo-Spin-Valve Giant Magnetoresistance Arrays for Nanomagnet Logic by Liftoff and the Snow-Jet Process.
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DOI码：10.1116/1.4907408
发表刊物：Journal of Vacuum Science & Technology B
摘要：In Nanomagnet Logic, an electronic read-out device converts magnetization to electronic signals. A giant magnetoresistance (GMR) stack, with simple deposition procedures, is a good candidate for this purpose. In this paper, the authors propose a way to pattern GMR films with the help of a CO2 snow-jet to simplify device fabrication procedures. A scanning electron microscope and a vibrating sample magnetometer were used to characterize the devices and verify the feasibility of the fabrication method. Results have shown that the CO2 snow-jet process can remove sidewalls of nanopillars that are formed after lift-off of sputtered films, and the nanopillars are uniform in shape and size. This method presents a new way to fabricate electronic readout devices for Nanomagnet Logic circuits.
论文编号：022801
学科门类：工学
卷号：33
期号：2
是否译文：否
发表时间：2015-02-20
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