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凹腔型线圈天线的感应耦合等离子体发生设备

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:Liu Wandong,白小燕,陈志鹏,王慧慧,lihong,罗辰,吉亮亮,胡北

  • Patent description:发明

  • Application Number:200610164811.0

  • Number of Inventors:9

  • Service Invention or Not:no

  • Publication Date:2007-09-26

  • First Author:欧阳亮

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