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Comparisons of the Characteristic on the Mode Transition in an
Inductively Coupled Discharge by Exciting Coil Change
Release time:2021-07-23 Hits:
Impact Factor: 1.309
DOI number: 10.1109/TPS.2017.2660496
Journal: IEEE TRANSACTIONS ON PLASMA SCIENCE
Correspondence Author: liuyu
Document Code: 000396397500001
Volume: 45
Issue: 3
Page Number: 338-345
ISSN No.: 0093-3813
Translation or Not: no
Date of Publication: 2017-02-28
Included Journals: SCI