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一种高电离率大面积氧化物阴极等离子体源阴极及制作方法
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: liuyu,余鹏程,leijiuhou,caojinxiang
Patent description: 发明
Application Number: 201810225363.3
Number of Inventors: 5
Service Invention or Not: no
Publication Date: 2018-08-17
First Author: 李敏迟