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谐振腔式ECR等离子体源装置以及方法
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: 张仲恺,leijiuhou,caojinxiang
Patent description: 发明公开
Application Number: 201910649890.1
Number of Inventors: 4
Service Invention or Not: no
Publication Date: 2019-09-13
First Author: liuyu