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一种用于隔离束源室与质谱的超高真空超薄插板阀
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: 陈夏敏,文武,李天宇,panyang
Patent description: 实用新型
Application Number: 201720481124.5
Number of Inventors: 5
Service Invention or Not: no
Publication Date: 2017-12-22
Authorization Date: 2017-12-22
First Author: yangjiuzhong