Resistive diamond-like carbon coatings for micro-pattern gaseous detectors: a review from USTC
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DOI码：10.3389/fdest.2026.1769015
发表刊物：Frontiers in Detector Science and Technology
关键字：diamond-like carbon, gaseous particle detectors, magnetron sputtering, micropattern gaseous detectors, resistive detector electrodes
摘要：The integration of resistive materials has fundamentally advanced Micro-Pattern Gaseous Detector (MPGD) technology, enabling robust, high-gain operation essential for modern particle physics experiments. Diamond-Like Carbon (DLC) has emerged as a superior material for this purpose due to its uniquely tunable electrical, mechanical, and chemical properties. This article provides a comprehensive review of the development, fabrication, and application of DLC-based resistive coatings for MPGDs, with a focus on work conducted by the University of Science and Technology of China MPGD group. We detail the material fundamentals of DLC, systematically introduce magnetron sputtering as the core deposition methodology, and analyze the critical relationship between coating properties—such as resistivity, uniformity, adhesion, and stability—and final detector performance. A thorough examination of specific detector architectures (μ-RWELL, μRGroove, THGEMs, RWELL, Picosecond Micromegas) demonstrates the transformative impact of DLC. Finally, we summarized the outstanding technical challenges and present a perspective on future research directions aimed at scaling this technology for next-generation experiments.
论文类型：期刊论文
学科门类：理学
文献类型：J
期号：4
页面范围：1769015
是否译文：否
发表时间：2026-03-09
发布期刊链接：https://www.frontiersin.org/articles/10.3389/fdest.2026.1769015/full
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