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一种真空室内电子束束斑检测器靶座
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: 吴芳芳,sunbaogen,luping,韦隽昊,刘啸宇
Patent description: 发明
Application Number: 201611249357.9
Number of Inventors: 6
Service Invention or Not: no
Publication Date: 2017-03-15
First Author: yangyongliang