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孙方稳

Professor

Supervisor of Doctorate Candidates


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Administrative Position:发展规划处处长

Education Level:With Certificate of Graduation for Doctorate Study

Degree:Dr

Alma Mater:中国科学技术大学

Discipline:Physics
Other specialties in Optical Engineering

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Current position: Home >> Scientific Research >> Patents
自动化气体脉冲刻蚀方法、装置及系统

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Affilication of Author(s):中国科学技术大学

Disigner of the Invention:吴晓伟,weiwei,Sun Fangwen,fushaojun,hanzhengfu,guoguangcan

Patent description:发明

Application Number:201110009273.9

Number of Inventors:7

Service Invention or Not:no

Publication Date:2012-07-18

Authorization Date:2015-09-09

First Author:cuijinming