%PDF-1.6 %öäüß 1 0 obj << /Lang (en) /MarkInfo 2 0 R /Metadata 3 0 R /Names 4 0 R /Outlines 5 0 R /PageLabels 6 0 R /Pages 7 0 R /StructTreeRoot 8 0 R /Type /Catalog /Version /1.6 /ViewerPreferences 9 0 R >> endobj 10 0 obj << /CreationDate (D:20260306023349+05'30') /Creator (PTC Arbortext Layout Developer 12.3.6865/W-x64) /EPSprocessor (PStill version 1.84.42) /Producer (PDFlib+PDI 10.0.2p2 \(C++/Win64\)) >> endobj 2 0 obj << /Marked true >> endobj 3 0 obj << /Type /Metadata /Subtype /XML /Length 11 0 R >> stream dvips + MiKTeX GPL Ghostscript 9.0 diamond-like carbon, gaseous particle detectors, magnetron sputtering, micropattern gaseous detectors, resistive detector electrodes Resistive diamond-like carbon coatings for micro-pattern gaseous detectors: a review from USTC Guofeng Song Lunlin Shang Xu Wang Yi Zhou Jianbei Liu Ming Shao Zhiyong Zhang Song G, Shang L, Wang X, Zhou Y, Liu J, Shao M and Zhang Z (2026) Resistive diamond-like carbon coatings for micro-pattern gaseous detectors: a review from USTC. Front. Detect. Sci. Technol. 4:1769015. doi: 10.3389/fdest.2026.1769015 diamond-like carbongaseous particle detectorsmagnetron sputteringmicropattern gaseous detectorsresistive detector electrodes Copyright © 2026 Song, Shang, Wang, Zhou, Liu, Shao and Zhang. This is an open-access article distributed under the terms of the Creative Commons Attribution License (CC BY). The use, distribution or reproduction in other forums is permitted, provided the original author(s) and the copyright owner(s) are credited and that the original publication in this journal is cited, in accordance with accepted academic practice. No use, distribution or reproduction is permitted which does not comply with these terms. 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341 0 obj << /Alt (Reference Link for rid: F3) /K [9 1557 0 R] /P 103 0 R /Pg 47 0 R /S /Link /Type /StructElem >> endobj 342 0 obj << /Alt (Reference Link for rid: F4) /K [14 1558 0 R] /P 106 0 R /Pg 47 0 R /S /Link /Type /StructElem >> endobj 343 0 obj << /Alt (Reference Link for rid: F5) /K [16 1559 0 R] /P 107 0 R /Pg 47 0 R /S /Link /Type /StructElem >> endobj 344 0 obj << /Alt (Reference Link for rid: B71) /K [20 1560 0 R 1561 0 R] /P 349 0 R /Pg 47 0 R /S /Link /Type /StructElem >> endobj 345 0 obj << /Alt (External link to frontiersin.org) /K [22 1562 0 R] /P 350 0 R /Pg 47 0 R /S /Link /Type /StructElem >> endobj 346 0 obj << /Alt (External link to frontiersin.org) /K [1563 0 R 23] /P 350 0 R /Pg 47 0 R /S /Link /Type /StructElem >> endobj 347 0 obj << /Alt (External link to doi.org) /K [1564 0 R 26] /P 351 0 R /Pg 47 0 R /S /Link /Type /StructElem >> endobj 348 0 obj << /A 1565 0 R /Alt (Diagram illustrating the magnetron sputtering process, showing a magnetron cathode with magnet array, carbon target, plasma zone with ionized argon and target material, a magnetic field, and a substrate holder with deposited sputtered film.) /K [18 1566 0 R] /P 108 0 R /Pg 47 0 R /S /Figure /T (FIGURE 3) /Type /StructElem >> endobj 349 0 obj << /K [19 344 0 R 21] /P 1566 0 R /Pg 47 0 R /S /P /Type /StructElem >> endobj 350 0 obj << /K [345 0 R 346 0 R 24] /P 109 0 R /Pg 47 0 R /S /P /Type /StructElem >> endobj 351 0 obj << /K [25 347 0 R] /P 110 0 R /Pg 47 0 R /S /P /Type /StructElem >> endobj 352 0 obj << /Alt (Reference Link for rid: B67) /K [3 1567 0 R] /P 113 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 353 0 obj << /Alt (Reference Link for rid: B48) /K [5 1568 0 R] /P 113 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 354 0 obj << /Alt (Reference Link for rid: B71) /K [8 1569 0 R] /P 114 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 355 0 obj << /Alt (Reference Link for rid: B46) /K [10 1570 0 R 1571 0 R] /P 114 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 356 0 obj << /Alt (Reference Link for rid: F6) /K [13 1572 0 R] /P 115 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 357 0 obj << /Alt (Reference Link for rid: F7) /K [16 1573 0 R] /P 116 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 358 0 obj << /Alt (Reference Link for rid: F7) /K [18 1574 0 R] /P 116 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 359 0 obj << /Alt (External link to frontiersin.org) /K [24 1575 0 R] /P 366 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 360 0 obj << /Alt (External link to frontiersin.org) /K [1576 0 R 25] /P 366 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 361 0 obj << /Alt (External link to doi.org) /K [1577 0 R 28] /P 367 0 R /Pg 48 0 R /S /Link /Type /StructElem >> endobj 362 0 obj << /A 1578 0 R /Alt (Open vacuum chamber with a cylindrical metallic sample holder is shown on the left, while the diagram on the right labels major parts of a vacuum sputtering system for thin film deposition, including sample holder, vacuum chamber, power sources, pump system, gas inlets, and target.) /K [20 1579 0 R] /P 117 0 R /Pg 48 0 R /S /Figure /T (FIGURE 4) /Type /StructElem >> endobj 363 0 obj << /K 21 /P 1579 0 R /Pg 48 0 R /S /P /Type /StructElem >> endobj 364 0 obj << /A 1580 0 R /Alt (Flowchart illustrates the process of obtaining DLC samples with five steps: sample clamping, vacuuming the coating chamber, sputtering coating DLC, cooling the chamber and target, and inflating the chamber to retrieve samples.) /K [22 1581 0 R] /P 118 0 R /Pg 48 0 R /S /Figure /T (FIGURE 5) /Type /StructElem >> endobj 365 0 obj << /K 23 /P 1581 0 R /Pg 48 0 R /S /P /Type /StructElem >> endobj 366 0 obj << /K [359 0 R 360 0 R 26] /P 119 0 R /Pg 48 0 R /S /P /Type /StructElem >> endobj 367 0 obj << /K [27 361 0 R] /P 120 0 R /Pg 48 0 R /S /P /Type /StructElem >> endobj 368 0 obj << /Alt (Reference Link for rid: B85) /K [4 1582 0 R] /P 124 0 R /Pg 49 0 R /S /Link /Type /StructElem >> endobj 369 0 obj << /Alt (Reference Link for rid: F8) /K [7 1583 0 R] /P 125 0 R /Pg 49 0 R /S /Link /Type /StructElem >> endobj 370 0 obj << /Alt (Reference Link for rid: B46) /K [9 1584 0 R] /P 125 0 R /Pg 49 0 R /S /Link /Type /StructElem >> endobj 371 0 obj << /Alt (Reference Link for rid: B34) /K [13 1585 0 R] /P 127 0 R /Pg 49 0 R /S /Link /Type /StructElem >> endobj 372 0 obj << /Alt (Reference Link for rid: B85) /K [15 1586 0 R] /P 127 0 R /Pg 49 0 R /S /Link /Type /StructElem >> endobj 373 0 obj << /Alt (External link to frontiersin.org) /K [21 1587 0 R] /P 380 0 R /Pg 49 0 R /S /Link /Type /StructElem >> endobj 374 0 obj << /Alt (External link to frontiersin.org) /K [1588 0 R 22] /P 380 0 R /Pg 49 0 R /S /Link /Type /StructElem >> endobj 375 0 obj << /Alt (External link to doi.org) /K [1589 0 R 25] /P 381 0 R /Pg 49 0 R /S /Link /Type /StructElem >> endobj 376 0 obj << /A 1590 0 R /Alt (Panel a shows two glossy black objects, one curved and one cylindrical, placed on a white surface. Panel b displays a square, blue-coated glass plate with illuminated reflections and a dark border.) /K [17 1591 0 R] /P 128 0 R /Pg 49 0 R /S /Figure /T (FIGURE 6) /Type /StructElem >> endobj 377 0 obj << /K 18 /P 1591 0 R /Pg 49 0 R /S /P /Type /StructElem >> endobj 378 0 obj << /A 1592 0 R /Alt (Panel \(a\) shows a gloved hand holding a rectangular glass slide with a visible coating, while panel \(b\) displays a line graph labeled in nanometers and microns, annotating diamond-like carbon \(DLC\) coating thickness and the transition between DLC-coated and uncoated regions.) /K [19 1593 0 R] /P 129 0 R /Pg 49 0 R /S /Figure /T (FIGURE 7) /Type /StructElem >> endobj 379 0 obj << /K 20 /P 1593 0 R /Pg 49 0 R /S /P /Type /StructElem >> endobj 380 0 obj << /K [373 0 R 374 0 R 23] /P 130 0 R /Pg 49 0 R /S /P /Type /StructElem >> endobj 381 0 obj << /K [24 375 0 R] /P 131 0 R /Pg 49 0 R /S /P /Type /StructElem >> endobj 382 0 obj << /Alt (Reference Link for rid: B70) /K [2 1594 0 R] /P 133 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 383 0 obj << /Alt (Reference Link for rid: B46) /K [4 1595 0 R] /P 133 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 384 0 obj << /Alt (Reference Link for rid: B84) /K [6 1596 0 R 1597 0 R] /P 133 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 385 0 obj << /Alt (Reference Link for rid: B44) /K [8 1598 0 R] /P 133 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 386 0 obj << /Alt (Reference Link for rid: F9) /K [10 1599 0 R] /P 133 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 387 0 obj << /Alt (Reference Link for rid: F10) /K [14 1600 0 R] /P 135 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 388 0 obj << /Alt (Reference Link for rid: B84) /K [16 1601 0 R] /P 135 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 389 0 obj << /Alt (Reference Link for rid: B88) /K [18 1602 0 R] /P 135 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 390 0 obj << /Alt (Reference Link for rid: B83) /K [20 1603 0 R] /P 135 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 391 0 obj << /Alt (Reference Link for rid: B85) /K [23 1604 0 R] /P 136 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 392 0 obj << /Alt (Reference Link for rid: F11) /K [25 1605 0 R] /P 136 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 393 0 obj << /Alt (Reference Link for rid: B46) /K [30 1606 0 R] /P 400 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 394 0 obj << /Alt (Reference Link for rid: B46) /K [34 1607 0 R] /P 402 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 395 0 obj << /Alt (Reference Link for rid: B84) /K [36 1608 0 R] /P 402 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 396 0 obj << /Alt (External link to frontiersin.org) /K [38 1609 0 R] /P 403 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 397 0 obj << /Alt (External link to frontiersin.org) /K [1610 0 R 39] /P 403 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 398 0 obj << /Alt (External link to doi.org) /K [1611 0 R 42] /P 404 0 R /Pg 50 0 R /S /Link /Type /StructElem >> endobj 399 0 obj << /A 1612 0 R /Alt (Line graph showing resistivity in megaohms per square \(black line, left y-axis\) decreasing and thickness in nanometers \(red line, right y-axis\) increasing with deposition time in minutes \(x-axis\), from 20 to 60 minutes.) /K [28 1613 0 R] /P 138 0 R /Pg 50 0 R /S /Figure /T (FIGURE 8) /Type /StructElem >> endobj 400 0 obj << /K [29 393 0 R 31] /P 1613 0 R /Pg 50 0 R /S /P /Type /StructElem >> endobj 401 0 obj << /A 1614 0 R /Alt /K [32 1615 0 R] /P 139 0 R /Pg 50 0 R /S /Figure /T (FIGURE 9) /Type /StructElem >> endobj 402 0 obj << /K [33 394 0 R 35 395 0 R 37] /P 1615 0 R /Pg 50 0 R /S /P /Type /StructElem >> endobj 403 0 obj << /K [396 0 R 397 0 R 40] /P 140 0 R /Pg 50 0 R /S /P /Type /StructElem >> endobj 404 0 obj << /K [41 398 0 R] /P 141 0 R /Pg 50 0 R /S /P /Type /StructElem >> endobj 405 0 obj << /Alt (Reference Link for rid: B67) /K [1 1616 0 R] /P 137 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 406 0 obj << /Alt (Reference Link for rid: B34) /K [3 1617 0 R] /P 137 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 407 0 obj << /Alt (Reference Link for rid: F12) /K [7 1618 0 R] /P 143 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 408 0 obj << /Alt (Reference Link for rid: F13) /K [10 1619 0 R] /P 144 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 409 0 obj << /Alt (Reference Link for rid: B85) /K [12 1620 0 R] /P 144 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 410 0 obj << /Alt (Reference Link for rid: F14) /K [14 1621 0 R] /P 144 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 411 0 obj << /Alt (Reference Link for rid: F14) /K [16 1622 0 R] /P 144 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 412 0 obj << /Alt (Reference Link for rid: B54) /K [18 1623 0 R] /P 144 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 413 0 obj << /Alt (Reference Link for rid: B59) /K [20 1624 0 R] /P 144 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 414 0 obj << /Alt (Reference Link for rid: B88) /K [26 1625 0 R] /P 421 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 415 0 obj << /Alt (Reference Link for rid: B84) /K [28 1626 0 R] /P 421 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 416 0 obj << /Alt (Reference Link for rid: B85) /K [32 1627 0 R] /P 423 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 417 0 obj << /Alt (External link to frontiersin.org) /K [34 1628 0 R] /P 424 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 418 0 obj << /Alt (External link to frontiersin.org) /K [1629 0 R 35] /P 424 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 419 0 obj << /Alt (External link to doi.org) /K [1630 0 R 38] /P 425 0 R /Pg 51 0 R /S /Link /Type /StructElem >> endobj 420 0 obj << /A 1631 0 R /Alt (Figure \(a\) presents a line graph showing resistivity in megaohms per square versus days, with resistivity rising quickly then leveling off around 60 megaohms per square by day nine. Figure \(b\) displays two line graphs comparing resistivity over time for samples exposed to three standard cubic centimeters per minute nitrogen and four standard cubic centimeters per minute nitrogen, showing much higher increases for the higher flow rate sample, peaking near 150 megaohms per square by day sixteen, while the lower flow rate remains below 40 megaohms per square.) /K [24 1632 0 R] /P 147 0 R /Pg 51 0 R /S /Figure /T (FIGURE 10) /Type /StructElem >> endobj 421 0 obj << /K [25 414 0 R 27 415 0 R 29] /P 1632 0 R /Pg 51 0 R /S /P /Type /StructElem >> endobj 422 0 obj << /A 1633 0 R /Alt (Scatter plot showing R stable over R initial versus number of DLC samples. Red circles represent DLC made by Teer, clustered between one point two and one point five. Blue stars represent DLC made by Hauzer, ranging from about one point six to over two. Legend located at the top right.) /K [30 1634 0 R] /P 148 0 R /Pg 51 0 R /S /Figure /T (FIGURE 11) /Type /StructElem >> endobj 423 0 obj << /K [31 416 0 R 33] /P 1634 0 R /Pg 51 0 R /S /P /Type /StructElem >> endobj 424 0 obj << /K [417 0 R 418 0 R 36] /P 149 0 R /Pg 51 0 R /S /P /Type /StructElem >> endobj 425 0 obj << /K [37 419 0 R] /P 150 0 R /Pg 51 0 R /S /P /Type /StructElem >> endobj 426 0 obj << /Alt (Reference Link for rid: B74) /K [1 1635 0 R 1636 0 R] /P 146 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 427 0 obj << /Alt (Reference Link for rid: F15) /K [3 1637 0 R] /P 146 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 428 0 obj << /Alt (Reference Link for rid: B47) /K [6 1638 0 R 1639 0 R] /P 151 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 429 0 obj << /Alt (Reference Link for rid: B85) /K [8 1640 0 R 1641 0 R] /P 151 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 430 0 obj << /Alt (Reference Link for rid: B87) /K [10 1642 0 R] /P 151 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 431 0 obj << /Alt (Reference Link for rid: B1) /K [12 1643 0 R] /P 151 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 432 0 obj << /Alt (External link to frontiersin.org) /K [20 1644 0 R] /P 439 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 433 0 obj << /Alt (External link to frontiersin.org) /K [1645 0 R 21] /P 439 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 434 0 obj << /Alt (External link to doi.org) /K [1646 0 R 24] /P 440 0 R /Pg 52 0 R /S /Link /Type /StructElem >> endobj 435 0 obj << /A 1647 0 R /Alt (Panel a shows a cylindrical metallic chamber with circular perforations and two rectangular sections on its side, positioned vertically inside an enclosed space. Panel b displays a square metallic frame with a central rectangular area mounted on a perforated metallic surface, illuminated by external lighting. Panel c depicts a circular base holding six vertical metallic rods with star-shaped tips, arranged in a symmetrical pattern inside an enclosure.) /K [16 1648 0 R] /P 154 0 R /Pg 52 0 R /S /Figure /T (FIGURE 12) /Type /StructElem >> endobj 436 0 obj << /K 17 /P 1648 0 R /Pg 52 0 R /S /P /Type /StructElem >> endobj 437 0 obj << /A 1649 0 R /Alt (Panel \(a\) shows the interior of a vacuum chamber with a labeled 65 centimeter carbon target on the left and a cylindrical APICAL foil mounted inside. Panel \(b\) displays a person wearing gloves operating the chamber with a large cylindrical target visible inside.) /K [18 1650 0 R] /P 155 0 R /Pg 52 0 R /S /Figure /T (FIGURE 13) /Type /StructElem >> endobj 438 0 obj << /K 19 /P 1650 0 R /Pg 52 0 R /S /P /Type /StructElem >> endobj 439 0 obj << /K [432 0 R 433 0 R 22] /P 156 0 R /Pg 52 0 R /S /P /Type /StructElem >> endobj 440 0 obj << /K [23 434 0 R] /P 157 0 R /Pg 52 0 R /S /P /Type /StructElem >> endobj 441 0 obj << /Alt (Reference Link for rid: B85) /K [3 1651 0 R] /P 446 0 R /Pg 53 0 R /S /Link /Type /StructElem >> endobj 442 0 obj << /Alt (External link to frontiersin.org) /K [7 1652 0 R] /P 449 0 R /Pg 53 0 R /S /Link /Type /StructElem >> endobj 443 0 obj << /Alt (External link to frontiersin.org) /K [1653 0 R 8] /P 449 0 R /Pg 53 0 R /S /Link /Type /StructElem >> endobj 444 0 obj << /Alt (External link to doi.org) /K [1654 0 R 11] /P 450 0 R /Pg 53 0 R /S /Link /Type /StructElem >> endobj 445 0 obj << /A 1655 0 R /Alt (Heatmap \(a\) shows a two-dimensional distribution of DLC thickness in nanometers across a 120 by 60 centimeter surface, with thickness decreasing from red at the top and left edges to blue toward the center. Bar chart \(b\) displays DLC thickness versus height, with bars decreasing in length from top to bottom, reflecting data from heatmap \(a\).) /K [1 1656 0 R] /P 158 0 R /Pg 53 0 R /S /Figure /T (FIGURE 14) /Type /StructElem >> endobj 446 0 obj << /K [2 441 0 R 4] /P 1656 0 R /Pg 53 0 R /S /P /Type /StructElem >> endobj 447 0 obj << /A 1657 0 R /Alt <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> /K [5 1658 0 R] /P 159 0 R /Pg 53 0 R /S /Figure /T (FIGURE 15) /Type /StructElem >> endobj 448 0 obj << /K 6 /P 1658 0 R /Pg 53 0 R /S /P /Type /StructElem >> endobj 449 0 obj << /K [442 0 R 443 0 R 9] /P 160 0 R /Pg 53 0 R /S /P /Type /StructElem >> endobj 450 0 obj << /K [10 444 0 R] /P 161 0 R /Pg 53 0 R /S /P /Type /StructElem >> endobj 451 0 obj << /Alt (Reference Link for rid: B9) /K [2 1659 0 R 1660 0 R] /P 163 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 452 0 obj << /Alt (Reference Link for rid: B12) /K [4 1661 0 R] /P 163 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 453 0 obj << /Alt (Reference Link for rid: F16) /K [6 1662 0 R] /P 163 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 454 0 obj << /Alt (Reference Link for rid: B46) /K [9 1663 0 R] /P 164 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 455 0 obj << /Alt (Reference Link for rid: B88) /K [11 1664 0 R] /P 164 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 456 0 obj << /Alt (Reference Link for rid: F16) /K [13 1665 0 R] /P 164 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 457 0 obj << /Alt (Reference Link for rid: B13) /K [15 1666 0 R] /P 164 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 458 0 obj << /Alt (Reference Link for rid: B14) /K [17 1667 0 R] /P 164 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 459 0 obj << /Alt (Reference Link for rid: B77) /K [19 1668 0 R] /P 164 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 460 0 obj << /Alt (Reference Link for rid: B77) /K [23 1669 0 R] /P 166 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 461 0 obj << /Alt (Reference Link for rid: F17) /K [25 1670 0 R] /P 166 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 462 0 obj << /Alt (Reference Link for rid: B37) /K [28 1671 0 R] /P 167 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 463 0 obj << /Alt (Reference Link for rid: B38) /K [30 1672 0 R 1673 0 R] /P 167 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 464 0 obj << /Alt (External link to frontiersin.org) /K [36 1674 0 R] /P 471 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 465 0 obj << /Alt (External link to frontiersin.org) /K [1675 0 R 37] /P 471 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 466 0 obj << /Alt (External link to doi.org) /K [1676 0 R 40] /P 472 0 R /Pg 54 0 R /S /Link /Type /StructElem >> endobj 467 0 obj << /A 1677 0 R /Alt /K [32 1678 0 R] /P 168 0 R /Pg 54 0 R /S /Figure /T (FIGURE 16) /Type /StructElem >> endobj 468 0 obj << /K 33 /P 1678 0 R /Pg 54 0 R /S /P /Type /StructElem >> endobj 469 0 obj << /A 1679 0 R /Alt (Cross-sectional diagram and 3D illustration of a micro-patterned detector structure showing labeled groove pitch of 400 micrometers, groove width of 70 or 50 micrometers, APICAL thickness of 50 micrometers, DLC layer rated around fifty megaohms per square, underlying 25 micrometer pre-preg and 25 micrometer polyimide layers, and readout PCB. The bottom 3D view indicates alternating yellow and red grooves with X and Y readout strips highlighted.) /K [34 1680 0 R] /P 169 0 R /Pg 54 0 R /S /Figure /T (FIGURE 17) /Type /StructElem >> endobj 470 0 obj << /K 35 /P 1680 0 R /Pg 54 0 R /S /P /Type /StructElem >> endobj 471 0 obj << /K [464 0 R 465 0 R 38] /P 170 0 R /Pg 54 0 R /S /P /Type /StructElem >> endobj 472 0 obj << /K [39 466 0 R] /P 171 0 R /Pg 54 0 R /S /P /Type /StructElem >> endobj 473 0 obj << /Alt (Reference Link for rid: B1) /K [1 1681 0 R] /P 167 0 R /Pg 55 0 R /S /Link /Type /StructElem >> endobj 474 0 obj << /Alt (Reference Link for rid: B66) /K [7 1682 0 R 1683 0 R] /P 175 0 R /Pg 55 0 R /S /Link /Type /StructElem >> endobj 475 0 obj << /Alt (Reference Link for rid: B36) /K [9 1684 0 R] /P 175 0 R /Pg 55 0 R /S /Link /Type /StructElem >> endobj 476 0 obj << /Alt (Reference Link for rid: B89) /K [11 1685 0 R] /P 175 0 R /Pg 55 0 R /S /Link /Type /StructElem >> endobj 477 0 obj << /Alt (Reference Link for rid: 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