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The geometric parameters are: p = 340 nm, w = 2\ 10 nm, h = 220 nm. \nb, Calcula:170)/F 4/H/N/Rect[324.683 184.27 332.466 174.09]/Subtype/Link/Type/Annot>> endobj 350 0 obj <>/Subtype/Form/Type/XObject>>stream H0 endstream endobj 351 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 1 | Origin of intrinsic chirality induced by slant perturbation. \na, Schem\ atic of the slant-perturbation metasurface to realize intrinsic chiral BICs. 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M{;] L>+W 'x]E]hWLׂDDDdVZuZ -c <ͤRQI<OoEܻMgxJ Zp*Dm8ߪnx{LO֖*мD]㋈D׍E+=~ZțNgJanyM +/ +D RJROBAYӅl&BpCn9J"rLL#aohe葙mΛImDM"7@0yxbFd@7r^D\q#5[AOE)P/+(WZMRhH6u!y+,e䫀*Xm"BE"a9oBNk9H=f6 ԍi Ұh:Fc`ir-#a8mءn̴2*=s.9:6qp㰚n*(y:#gB=Qj\ tL a&IyQ%IXP!HaI\x kqûwQJelݛ =8l9"DHј> endobj 73 0 obj [74 0 R 75 0 R 76 0 R 77 0 R 78 0 R 79 0 R 80 0 R] endobj 74 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 2 | Design, fabrication and characterization of slant-perturbation metasurfaces.\ a, Unbalanced OCD integrated over the metasurface as a function of the slant angle for different quasi-BICs. b, Evoluti\ on of C points over k-space f:183)/F 4/H/N/Rect[268.503 248.77 278.042 238.59]/Subtype/Link/Type/Annot>> endobj 75 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 2 | Design, fabrication and characterization of slant-perturbation metasurfaces\ . a, Unbalanced OCD integrated over the metasurface as a function of the slant angle for different quasi-BICs. b, Evolut\ ion of C points over k-space :184)/F 4/H/N/Rect[280.102 130.52 289.54 120.34]/Subtype/Link/Type/Annot>> endobj 76 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 2 | Design, fabrication and characterization of slant-perturbation metasurface\ s. a, Unbalanced OCD integrated over the metasurface as a function of the slant angle for different quasi-BICs. b, Evolu\ tion of C points over k-space:185)/F 4/H/N/Rect[452.629 313.27 461.35 303.09]/Subtype/Link/Type/Annot>> endobj 77 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 2 | Design, fabrication and characterization of slant-perturbation metasurfac\ es. a, Unbalanced OCD integrated over the metasurface as a function of the slant angle for different quasi-BICs. b, Evol\ ution of C points over k-spac:186)/F 4/H/N/Rect[497.047 270.27 506.737 260.09]/Subtype/Link/Type/Annot>> endobj 78 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 2 | Design, fabrication and characterization of slant-perturbation metasurfa\ ces. a, Unbalanced OCD integrated over the metasurface as a function of the slant angle for different quasi-BICs. b, Evo\ lution of C points over k-spa:187)/F 4/H/N/Rect[478.717 195.02 488.454 184.84]/Subtype/Link/Type/Annot>> endobj 79 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 3 | Inherent linkage between geometric perturbations for achieving chiral BICs.\ a, Incident angles for which C+ and C" points are observed for different slant angles , retrieved from simulations a\ nd experiments. b, CD amplitude:188)/F 4/H/N/Rect[473.441 119.77 482.227 109.59]/Subtype/Link/Type/Annot>> endobj 80 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 1 | Origin of intrinsic chirality induced by slant perturbation. \na,\ Schematic of the slant-perturbation metasurface to realize intrinsic chiral BICs. 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[uh9Ot|F)WE?c׮+m= ɀO6桐O֜==H*ؖS[wal,A"3?jl[zJ\.(hhr +pbPz鰩{s>=̭#5d4ARkߡ C5$!KCEiPr q@>J`Zmj/2ZHDg0Ӿf9?(3P >@":J{LbdIpc[u<rջ1_$Tգ,f' &n?bi|3g,]iQS4c;oI+VXzQ$RhwE6h h(4[EXt!0L3~@X7YZK/ʠA‡`*{%IE`ys޹!,TpS>tDbˊo̒ }9IIA^H5N>v=c$EBn;icgi`'U&HGVX3᳭[l60Hl6ɗ+ i7IO}(d_7cͣՋ#%?>B!1ո|‹7Uc$=m("{sq Zc^WMX,s6O(+VXbA(2?+ Ov<$IB6-'HYu-.*K}ž<']Ykk)%`܁Zd0nGOܥ"t"e1D~'׿ٯ{&8ҥ]EQu,UJkSWFKV jimӗy{IrIػ!\._j:ՎkUn^;I9?gVލ}}˪E=xCƂy #[ٳek|I:<=T0?Y??=\TKLTQaH4|hx{[T˅1c}ͦXʌ]ѻj+KJfX%hY}a߿y[x&";3]gv~ -劌J' z^6a07lǨ3''O?WZ]=>燷UhmӋA/˚D"WaQ2cjӽC{s*R|zN\e^ʿ&WML vQO&':pJn̄۹E8>ޤCs kcRr ќCS,R~e%ŹK#2Z47L'ɾj \LqY+`FFCnw@ӄWMPd`"2<24<7-}8Jx\E)EJg$bDv)=I΄%,|N#PޖPRy疹? kݼ 6dQr @I&Oۃ-*5B)a$tC(#>kf) ʔt:+`D endstream endobj 106 0 obj <> endobj 107 0 obj [108 0 R 109 0 R 110 0 R 111 0 R 112 0 R 113 0 R 114 0 R 115 0 R 116 0 R 117 0 R 118 0 R 119 0 R] endobj 108 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:24. Koshelev, K., Lepeshov, S., Liu, M., Bogdanov, A. & Kivshar, Y. Asymmetric metasu\ rfaces with high-Q resonances governed by bound states in the continuum. Phys. Rev. Lett. 121, 193903 \(2018\).\r:190)/F 4/H/N/Rect[107.622 539.053 113.266 528.84]/Subtype/Link/Type/Annot>> endobj 109 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd::191)/F 4/H/N/Rect[145.198 442.303 149.67 432.09]/Subtype/Link/Type/Annot>> endobj 110 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 3 | Inherent linkage between geometric perturbations for achieving chiral BICs.\ a, Incident angles for which C+ and C" points are observed for different slant angles , retrieved from simulations \ and experiments. b, CD amplitud:192)/F 4/H/N/Rect[280.39 420.77 289.656 410.59]/Subtype/Link/Type/Annot>> endobj 111 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 3 | Inherent linkage between geometric perturbations for achieving chiral BICs.\ a, Incident angles for which C+ and C" points are observed for different slant angles , retrieved from simulations\ and experiments. b, CD amplitu:193)/F 4/H/N/Rect[58.2705 291.77 67.0529 281.59]/Subtype/Link/Type/Annot>> endobj 112 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:31. Taghizadeh, A. & Chung, I. S. Quasi bound states in the continuum with few unit ce\ lls of photonic crystal slab. Appl. Phys. Lett. 111, 031114 \(2017\).\r:194)/F 4/H/N/Rect[348.833 474.52 353.542 464.34]/Subtype/Link/Type/Annot>> endobj 113 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 4 | Giant CD and Q-factor enabled by intrinsic chiral BICs. a, Measured r\ eflection spectra of the two metasurface samples of 68 m \(L1 and R1\) and 200 m sizes \(L2 and R2\) under LCP and RCP incidence\ , respectively. Their retrieved CDs:195)/F 4/H/N/Rect[352.814 442.303 362.138 432.09]/Subtype/Link/Type/Annot>> endobj 114 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 4 | Giant CD and Q-factor enabled by intrinsic chiral BICs. a, Measured \ reflection spectra of the two metasurface samples of 68 m \(L1 and R1\) and 200 m sizes \(L2 and R2\) under LCP and RCP incidenc\ e, respectively. Their retrieved CD:196)/F 4/H/N/Rect[321.877 367.053 331.81 356.84]/Subtype/Link/Type/Annot>> endobj 115 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 4 | Giant CD and Q-factor enabled by intrinsic chiral BICs. a, Measured\ reflection spectra of the two metasurface samples of 68 m \(L1 and R1\) and 200 m sizes \(L2 and R2\) under LCP and RCP inciden\ ce, respectively. Their retrieved C:197)/F 4/H/N/Rect[338.11 281.053 347.181 270.84]/Subtype/Link/Type/Annot>> endobj 116 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:11. Shi, T. etal. Planar chiral metasurfaces with maximal and tunable chiroptical \ response driven by bound states in the continuum. Nat. Commun. 13, 4111 \(2022\).\r:198)/F 4/H/N/Rect[325.439 259.52 329.52 249.34]/Subtype/Link/Type/Annot>> endobj 117 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:14. Wu, C. etal. Spectrally selective chiral silicon metasurfaces based on infrared \ Fano resonances. Nat. Commun. 5, 3892 \(2014\).\r:199)/F 4/H/N/Rect[330.86 259.52 335.612 249.34]/Subtype/Link/Type/Annot>> endobj 118 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:32. Hentschel, M. etal. Optical Properties of chiral three-dimensional plasmonic olig\ omers at the onset of charge-transfer plasmons. ACS Nano 6, 10355 10365 \(2012\).\r:200)/F 4/H/N/Rect[336.952 259.52 342.117 249.34]/Subtype/Link/Type/Annot>> endobj 119 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:40. Ji, C.-Y. etal. Artificial propeller chirality and counterintuitive reversal of c\ ircular dichroism in twisted meta-molecules. 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Poulikakos, L. V. etal. Optical chirality flux as a useful far-field probe of chi\ ral near fields. ACS Photonics 3, 1619 1625 \(2016\).\r:172)/F 4/H/N/Rect[154.818 271.841 160.418 258.017]/Subtype/Link/Type/Annot>> endobj 4 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:29. Cameron, R. P., Barnett, S. M. & Yao, A. M. Optical helicity, optical spin and rel\ ated quantities in electromagnetic theory. New J. Phys. 14, 053050 \(2012\).\r:173)/F 4/H/N/Rect[161.803 271.841 167.476 258.017]/Subtype/Link/Type/Annot>> endobj 5 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:30. Tang, Y. & Cohen, A. E. Enhanced enantioselectivity in excitation of chiral molecu\ les by superchiral light. 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The geometric parameters are: p = 340 nm, w \ = 210 nm, h = 220 nm. \nb, Calc:176)/F 4/H/N/Rect[320.922 313.303 328.494 303.09]/Subtype/Link/Type/Annot>> endobj 8 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 1 | Origin of intrinsic chirality induced by slant perturbation. \na, Sc\ hematic of the slant-perturbation metasurface to realize intrinsic chiral BICs. The geometric parameters are: p = 340 nm, w \ = 210 nm, h = 220 nm. \nb, Cal:177)/F 4/H/N/Rect[501.815 270.27 509.447 260.09]/Subtype/Link/Type/Annot>> endobj 9 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 1 | Origin of intrinsic chirality induced by slant perturbation. \na, S\ chematic of the slant-perturbation metasurface to realize intrinsic chiral BICs. The geometric parameters are: p = 340 nm, w\ = 210 nm, h = 220 nm. \nb, Ca:178)/F 4/H/N/Rect[387.246 238.02 395.51 227.84]/Subtype/Link/Type/Annot>> endobj 10 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:12. Barron, L. D. Molecular Light Scattering and Optical Activity \(Cambridge Univ. P\ ress, 2004\).\r:179)/F 4/H/N/Rect[352.91 205.77 357.596 195.59]/Subtype/Link/Type/Annot>> endobj 11 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:15. Plum, E., Fedotov, V. A. & Zheludev, N. I. Optical activity in extrinsically chi\ ral metamaterial. Appl. Phys. Lett. 93, 191911 \(2008\).\r:180)/F 4/H/N/Rect[358.935 205.77 363.4 195.59]/Subtype/Link/Type/Annot>> endobj 12 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 1 | Origin of intrinsic chirality induced by slant perturbation. \na, \ Schematic of the slant-perturbation metasurface to realize intrinsic chiral BICs. The geometric parameters are: p = 340 nm, \ w = 210 nm, h = 220 nm. \nb, C:181)/F 4/H/N/Rect[367.374 119.902 375.896 109.582]/Subtype/Link/Type/Annot>> endobj 13 0 obj <>/BS<>/Border[0 0 0]/Dest(SpringerNature_Nature_5467.indd:Fig. 2 | Design, fabrication and characterization of slant-perturbation metasurfaces.\ a, Unbalanced OCD integrated over the metasurface as a function of the slant angle for different quasi-BICs. b, Evolutio\ n of C points over k-space fo:182)/F 4/H/N/Rect[337.34 109.636 345.807 96.1004]/Subtype/Link/Type/Annot>> endobj 14 0 obj <>/ExtGState<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI]/Properties<>/XObject<>>> endobj 15 0 obj <>stream x}K$GrMǹ.j*H.͈ V 4@tLnuUow5_.:H 2av22#<<<^|7_tM|z|/>ǯ/xMk_|źT /FwCk0BjH*as͗7//JVtOꟿq9ar?/?Ջfo^SW8t⣕uasZOiK#(^j-̅Ӌҿ-z[Z^VC u]L;_Ovawh-m^o/7+]l#MMs6{~Z} 2%(m늅}s{ov߭&xռ95|jwҭahiw<7%ZOvsy;Z#!;71bd;KXh.O@ӖVҷ=IjZj#,]F1JV]~E/8"?o67_єA/:was8^fGj6 AuyY4W9VF 5Зdę襄H*>0ʈ^ұ&$D h=H$ro4eq)\3{8a]^ؼᓟ| WE|?(i)FS.y@ AΠO"ζjРW½6\t}ѪL^6THKи92gm׵ T:}0Ox94a";) j&ʖw (|.8#$7P+7ާ-k1z_קL/LBxyGz9$2%B% 僆fc%DC",9yc/fpzhkxԄ$WYV [E3&"$Fa? 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