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可制备平整的薄膜材料的脉冲激光沉积方法及其装置

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:mayurong,fangrongchuan,wangguanzhong,韩新海

  • Patent description:发明

  • Application Number:01113665.0

  • Number of Inventors:5

  • Service Invention or Not:no

  • Publication Date:2003-01-08

  • First Author:沈维康

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