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磁场产生装置、磁控管阴极及溅射装置
Release time:2021-07-23 Hits:
Affilication of Author(s): 新柯隆株式会社;中国科学技术大学
Disigner of the Invention: linzijing,liming,xiebin,wanghaiqian,姜友松,长江亦周
Patent description: 发明
Application Number: 201180004548.8
Number of Inventors: 7
Service Invention or Not: no
Publication Date: 2012-10-10
First Author: 孔为