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用于管道内壁面的溅射镀膜装置

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  • Affilication of Author(s):中国科学技术大学

  • Disigner of the Invention:weiwei,张耀锋,fanle,wangjianping

  • Patent description:实用新型

  • Application Number:200520073493.8

  • Number of Inventors:5

  • Service Invention or Not:no

  • Publication Date:2007-02-14

  • Authorization Date:2007-02-14

  • First Author:wangyong

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