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王亮

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Degree:博士

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Current position: Home >> Scientific Research >> Paper Publications
Scanning near-field lithography with high precision flexure orientation stage control

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Impact Factor:1.81

DOI number:10.1007/s00339-017-1204-y

Journal:APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Correspondence Author:wangliang

Document Code:000409351400014

Volume:123

Issue:9

ISSN No.:0947-8396

Translation or Not:no

Date of Publication:2017-08-31

Included Journals:SCI

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