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王亮

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Current position: Home >> Scientific Research >> Patents
应用于近场扫描光刻的高精度被动对准的柔性台

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Affilication of Author(s):中国科学技术大学

Disigner of the Invention:张亮,秦金,谭浩森,许凯

Patent description:发明

Application Number:201710495565.5

Number of Inventors:5

Service Invention or Not:no

Publication Date:2017-08-29

Authorization Date:2018-11-13

First Author:wangliang