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一种基于表面等离子体干涉的可重构亚波长光栅光刻机

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Affilication of Author(s):中国科学技术大学

Disigner of the Invention:Douguo Zhang,陈漪恺,胡继刚,朱良富,wangpei,minghai

Patent description:发明

Application Number:201210431198.X

Number of Inventors:7

Service Invention or Not:no

Publication Date:2013-03-20

First Author:王向贤

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