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数字微镜设备与多面棱镜结合的多光束干涉光刻方法

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Affilication of Author(s):中国科学技术大学

Disigner of the Invention:luyonghua,wangpei

Patent description:发明

Application Number:201511017157.6

Number of Inventors:3

Service Invention or Not:no

Publication Date:2016-03-30

Authorization Date:2017-09-29

First Author:崔辰静

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