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一种真空室内电子束束斑检测器靶座
Release time:2024-06-20
Hits:
- Type of Patent:
- Invent
- State of Patent:
- Authorized patents
- Authorization number:
- ZL201611249357.9
- Number of Inventors:
- 6
- Service Invention or Not:
- no
- Application Date:
- 2016-12-29
- Authorization Date:
- 2019-02-01
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