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熊瑛

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一种X射线曝光间隙控制方法

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Affilication of Author(s):中国科学技术大学

Disigner of the Invention:xiongying,周杰,zhangxiaobo,tianyangchao

Patent description:发明

Application Number:200910241924.X

Number of Inventors:5

Service Invention or Not:no

Publication Date:2010-06-09

Authorization Date:2011-05-04

First Author:liugang

Pre One:一种去除微纳结构中溶剂的方法