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一种大高宽比微结构的光学检测方法

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Affilication of Author(s):中国科学技术大学

Disigner of the Invention:魏文彬,xiongying,侯双月,tianyangchao

Patent description:发明申请

Application Number:201911178380.7

Number of Inventors:5

Service Invention or Not:no

First Author:liugang

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