一种用于隔离束源室与质谱的超高真空超薄插板阀
Release time:2021-07-24
Hits:
- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- 陈夏敏,文武,李天宇,panyang
- Patent description:
- 发明
- Application Number:
- 201710304357.2
- Number of Inventors:
- 5
- Service Invention or Not:
- no
- Publication Date:
- 2017-07-25
- First Author:
- yangjiuzhong
- Pre One:一种用于不同扩散距离催化反应气相中间产物的原位探测装置
- Next One:一种用于在线分析固体燃料热解的大气压光电离质谱装置