一种用于隔离束源室与质谱的超高真空超薄插板阀
Release time:2021-07-24
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- 陈夏敏,文武,李天宇,panyang
- Patent description:
- 实用新型
- Application Number:
- 201720481124.5
- Number of Inventors:
- 5
- Service Invention or Not:
- no
- Publication Date:
- 2017-12-22
- Authorization Date:
- 2017-12-22
- First Author:
- yangjiuzhong
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