杨玖重

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一种用于隔离束源室与质谱的超高真空超薄插板阀

Release time:2021-07-24
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Affilication of Author(s):
中国科学技术大学
Disigner of the Invention:
陈夏敏,文武,李天宇,panyang
Patent description:
实用新型
Application Number:
201720481124.5
Number of Inventors:
5
Service Invention or Not:
no
Publication Date:
2017-12-22
Authorization Date:
2017-12-22
First Author:
yangjiuzhong