Rongjing Zhang, Doron Shilo, Guruswami Ravichandran, Kaushik Bhattacharya, Method and apparatus for measuring the mechanical response of micro-electro-mechanical systems. US patent 7444880B2, (2008)
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是否职务专利：否
申请日期：2021-09-03
公开日期：2021-09-03
授权日期：2021-09-03
