赵钢

E-Mail:

Administrative Position:实验室安全办公室主任

Contact Information:0551-63600214

Degree:Dr

Research Projects

Current position: Home > Scientific Research > Research Projects

SOI埋氧层应力对高灵敏微臂悬梁制作的影响机理研究

Release time:2021-07-24
Hits:
Teaching and Research Group:
精密机械与精密仪器系
Status:
进行
Note:
冻结第一笔到款1.8万元;至尾款到账后解冻
Classification of Project:
预付合同
Nature of Project:
横向项目
Supported by:
其他课题
Project Number:
KD1306190082
Date of Project Approval:
2013-06-19
Scheduled completion time:
2015-12-31
Date of Project Initiation:
2013-06-19
Subsidy Amount:
18.0