SOI埋氧层应力对高灵敏微臂悬梁制作的影响机理研究
Release time:2021-07-24
Hits:
- Teaching and Research Group:
- 精密机械与精密仪器系
- Status:
- 进行
- Note:
- 冻结第一笔到款1.8万元;至尾款到账后解冻
- Classification of Project:
- 预付合同
- Nature of Project:
- 横向项目
- Supported by:
- 其他课题
- Project Number:
- KD1306190082
- Date of Project Approval:
- 2013-06-19
- Scheduled completion time:
- 2015-12-31
- Date of Project Initiation:
- 2013-06-19
- Subsidy Amount:
- 18.0