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一种压电厚膜驱动的微变形镜及其制备方法
Release time:2021-07-23
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- Affilication of Author(s):
- 中国科学技术大学
- Disigner of the Invention:
- 许晓慧,wangxiang,zhaogang,冯艳,刘芳,liuyong,张晋弘
- Patent description:
- 发明
- Application Number:
- 200610167153.0
- Number of Inventors:
- 8
- Service Invention or Not:
- no
- Publication Date:
- 2007-08-22
- Authorization Date:
- 2009-01-21
- First Author:
- chujiaru
- Pre One:微细光固化厚膜逐层自动成型方法及装置