周成刚
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采用边缘曝光的电子束曝光工艺开发
Release time:2021-07-24 Hits:
Teaching and Research Group: 合肥微尺度物质科学国家研究中心
Status: 进行
Classification of Project: 预付合同
Nature of Project: 横向项目
Supported by: 企事业单位委托科技项目
Project Number: KD2104010102
Date of Project Approval: 2021-03-01
Scheduled completion time: 2021-12-01
Subsidy Amount: 100.0