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Influence of mixture compositions on ion energy distributions in Ar/N-2 electron cyclotron resonance plasma
Release time:2021-07-23
Hits:
- Impact Factor:
- 2.906
- DOI number:
- 10.1016/j.vacuum.2015.05.020
- Journal:
- VACUUM
- Correspondence Author:
- zhuxiaodong
- Document Code:
- 000359168900027
- Volume:
- 119
- Page Number:
- 174-178
- ISSN No.:
- 0042-207X
- Translation or Not:
- no
- Date of Publication:
- 2015-08-31
- Included Journals:
- SCI