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一种用于等离子体参数诊断的探针装置
Release time:2021-07-24 Hits:
Affilication of Author(s): 中国科学技术大学
Disigner of the Invention: liuyu,caojinxiang,徐亮,张仲凯,张逍
Patent description: 实用新型
Application Number: 201820821638.5
Number of Inventors: 6
Service Invention or Not: no
Publication Date: 2019-01-18
Authorization Date: 2019-01-18
First Author: 余鹏程