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一种用于等离子体参数诊断的探针装置
Release time:2021-07-24  Hits:

Affilication of Author(s): 中国科学技术大学

Disigner of the Invention: liuyu,caojinxiang,徐亮,张仲凯,张逍

Patent description: 实用新型

Application Number: 201820821638.5

Number of Inventors: 6

Service Invention or Not: no

Publication Date: 2019-01-18

Authorization Date: 2019-01-18

First Author: 余鹏程